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Investigating interactions of intense soft X-rays with solid surfaces and resulting phenomena is still challenging. One could expect material removal from the surfaces (ablation) caused by soft X-ray irradiation at a precision as high as the diffraction limit of the soft X-rays. The X-ray ablation technique could enable us to fabricate nano- and micro-structures on surfaces of even transparent materials such as silica glass, polymethylmethacrylate (PMMA) and polydimethylsiloxane (PDMS), which are highly valued for their use in the ﬁelds of nanometric chemical analysis and chemical reactions in medicine and biotechnology.