5 October 2012 Direct deposition of semitransparent conducting pyrolytic carbon films
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Abstract
Ultrathin pyrolytic carbon films were synthesized in a single step on dielectric substrates, using a methane-based chemical vapor deposition technique. The developed technique enables the production of wafer scale transparent conductive films suitable for applications in optics and optoelectronics.
© 2012 Society of Photo-Optical Instrumentation Engineers (SPIE)
Tommi Kaplas, Tommi Kaplas, Yuri P. Svirko, Yuri P. Svirko, } "Direct deposition of semitransparent conducting pyrolytic carbon films," Journal of Nanophotonics 6(1), 061703 (5 October 2012). https://doi.org/10.1117/1.JNP.6.061703 . Submission:
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