10 July 2014 Plane demagnifying nanolithography by hybrid hyperlens–superlens structure
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We propose a hybrid hyperlens–superlens structure to achieve demagnifying nanolithography. It consists of a core of planar superlens and a shell of cylinder hyperlens. In the nanolithography process, the shell of the cylinder hyperlens could demagnify the mask patterns to the interior cylinder interface, and then the core of the planar superlens transmits the demagnified patterns to the planar output photoresist layer. The performance of this hybrid hyperlens–superlens structure is analyzed for different periods and spacing of mask and demagnification factors. The numerical simulation results agree well with the theory. It is demonstrated that the hybrid structure could be used as a superresolution device for plane demagnifying nanolithography.
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
Gaofeng Liang, Gaofeng Liang, Zeyu Zhao, Zeyu Zhao, Na Yao, Na Yao, Changtao Wang, Changtao Wang, Bo Jiang, Bo Jiang, Qing Zhao, Qing Zhao, Xiangang Luo, Xiangang Luo, } "Plane demagnifying nanolithography by hybrid hyperlens–superlens structure," Journal of Nanophotonics 8(1), 083080 (10 July 2014). https://doi.org/10.1117/1.JNP.8.083080 . Submission:

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