15 July 2014 Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications
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Abstract
We present the design and the characterization of a polycrystalline silicon (Si)-based photonic crystal (PhC)-suspended membrane, working in the mid-infrared wavelengths. In order to facilitate transmission measurement, the PhC membrane is released by removing the underneath Si substrateWe present the design and the characterization of a polycrystalline silicon (Si)-based photonic crystal (PhC)-suspended membrane, working in the mid-infrared wavelengths. In order to facilitate transmission measurement, the PhC membrane is released by removing the underneath Si substrate. Around 97% reflection and 3% transmission at 3.58-μm wavelength are measured at room temperature. Characterization is also done at 450°C and it reveals that the peak reflection of the PhC membrane shifts by 75 nm to higher wavelengths. This corresponds to a linear wavelength shift of 0.174  nm/°C and the thermo-optic coefficient is calculated to be +1.70×10−4  K−1. By altering the dimension of the PhC air holes, it is also shown that such a thermo-optic effect is compensated.
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
Chong Pei Ho, Chong Pei Ho, Prakash Pitchappa, Prakash Pitchappa, Piotr Kropelnicki, Piotr Kropelnicki, Jian Wang, Jian Wang, Hong Cai, Hong Cai, Yuandong Gu, Yuandong Gu, Chengkuo Lee, Chengkuo Lee, } "Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications," Journal of Nanophotonics 8(1), 084096 (15 July 2014). https://doi.org/10.1117/1.JNP.8.084096 . Submission:
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