Effects of exposure and air annealing on MoO<sub>x</sub> thin films

Irfan Irfan; Yongli Gao

doi:10.1117/1.JPE.2.021213

Abstract

Thermally deposited molybdenum oxide films are investigated with X-ray photo-emission spectroscopy, ultra-violet photoemission spectroscopy and inverse photoemission spectroscopy. The Interface between MoO_x and copper pthalocynine (CuPc) is studied and the previously reported device performance improvement is explained, with the help of interface energy level alignment. The effect of oxygen and air exposure on MoOx films and growth of gap states with exposures are studied. The surface chemical compositions of MoOx films, of varying thicknesses from 1 nm to 50 nm, have also been investigated. For all the investigated film thicknesses, the thermally evaporated films are found to be oxygen deficient. It is believed, that the oxygen vacancies can be subdued to a great extent by annealing at elevated temperatures. We annealed the MoO_x thin films in air, at 300 °C for 20 h, and investigated the changes induced by the air annealing.

Citation Download Citation

Irfan Irfan, Irfan Irfan, Yongli Gao, Yongli Gao, } "Effects of exposure and air annealing on MoO_x thin films," Journal of Photonics for Energy 2(1), 021213 (27 June 2012). https://doi.org/10.1117/1.JPE.2.021213 . Submission:

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