17 February 2017 Optical design of freeform micro-optical elements and their fabrication combining maskless laser direct write lithography and replication by imprinting
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Abstract
Today, freeform micro-optical structures are desired components in many photonic and optical applications, such as lighting and detection systems, due to their compactness, ease of system integration, and superior optical performance. The high complexity of a freeform structure’s arbitrary surface profile and the need for high throughput upon fabrication require sophisticated approaches for their integration into a manufacturing process. In this paper, we discuss a smart fabrication process of freeform micro-optical elements that ranges from their design by optical simulations to their cost-efficient fabrication by maskless laser direct write lithography (MALA) and replication from the as-fabricated master by imprinting. Aided by profilometry and optical microscopy, the fidelity of the fabricated freeform micro-optical elements to the design is characterized. Finally, the light intensity distribution on a target plane affected by the freeform micro-optical element illuminated with a light-emitting diode is determined and compared with the predicted one.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Ladislav Kuna, Ladislav Kuna, Claude Leiner, Claude Leiner, Wolfgang Nemitz, Wolfgang Nemitz, Frank Reil, Frank Reil, Paul Hartmann, Paul Hartmann, Franz-Peter Wenzl, Franz-Peter Wenzl, Christian Sommer, Christian Sommer, } "Optical design of freeform micro-optical elements and their fabrication combining maskless laser direct write lithography and replication by imprinting," Journal of Photonics for Energy 7(1), 016002 (17 February 2017). https://doi.org/10.1117/1.JPE.7.016002 . Submission: Received: 12 November 2016; Accepted: 30 January 2017
Received: 12 November 2016; Accepted: 30 January 2017; Published: 17 February 2017
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