Resolving interferometric step-height measurement ambiguities using a priori information

John E. Greivenkamp; Kevin G. Sullivan; Russell J. Palum

doi:10.1117/12.55983

1 November 1991 Resolving interferometric step-height measurement ambiguities using a priori information

John E. Greivenkamp, Kevin G. Sullivan, Russell J. Palum

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Optical Engineering, Vol. 30, Issue 11, (November 1991). https://doi.org/10.1117/12.55983

Abstract

One of the principal concepts of sub-Nyquist interferometry is the use of all available knowledge about a surface to extend the available measurement range. The use of a priori information in resolving the ambiguities found in interferometric step-height measurements is explored. Information about the height of a step that has been obtained by another measurement technique or through process parameters, such as etch rate, may be used for this purpose. The theory behind this type of measurement and experimental results are presented.

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John E. Greivenkamp, Kevin G. Sullivan, and Russell J. Palum "Resolving interferometric step-height measurement ambiguities using a priori information," Optical Engineering 30(11), (1 November 1991). https://doi.org/10.1117/12.55983

Published: 1 November 1991

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