Characterization of microlenses using a phase-shifting shearing         interferometer

Horst Sickinger; Oliver R. Falkenstoerfer; Norbert Lindlein; Johannes Schwider

doi:10.1117/12.173567

1 August 1994 Characterization of microlenses using a phase-shifting shearing interferometer

Horst Sickinger, Oliver R. Falkenstoerfer, Norbert Lindlein, Johannes Schwider

Author Affiliations +

Optical Engineering, Vol. 33, Issue 8, (August 1994). https://doi.org/10.1117/12.173567

Abstract

A shearing interferometer is proposed for the characterization of microlenses. The optical configuration of the test system enables the measurement of the wave aberrations, the focal length, and the deviations of the lens surface from an ideal sphere. In addition, a quantitative evaluation method is given that enables the calculation of the wave aberrations (e.g., the phase function) from the shearing interferometer data.

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Horst Sickinger, Oliver R. Falkenstoerfer, Norbert Lindlein, and Johannes Schwider "Characterization of microlenses using a phase-shifting shearing interferometer," Optical Engineering 33(8), (1 August 1994). https://doi.org/10.1117/12.173567

Published: 1 August 1994

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