Fabrication, characteristics, and performance of diamond mirrors for vacuum ultraviolet excimer lasers

Kou Kurosawa; Ryoichi Sonouchi; Atsushi Yokotani; Wataru Sasaki; Masahito Kattoh; Yasuo Takigawa; Kazuhito Nishimura

doi:10.1117/12.199864

1 May 1995 Fabrication, characteristics, and performance of diamond mirrors for vacuum ultraviolet excimer lasers

Kou Kurosawa, Ryoichi Sonouchi, Atsushi Yokotani, Wataru Sasaki, Masahito Kattoh, Yasuo Takigawa, Kazuhito Nishimura

Author Affiliations +

Optical Engineering, Vol. 34, Issue 5, (May 1995). https://doi.org/10.1117/12.199864

Abstract

We have deposited crystalline diamond films on sintered Si₃N₄ substrates with a conventional hot-filament method and further finished the surfaces with a diamond lapping method. The diamond mirrors fabricated are proposed and demonstrated as among the most promising mirrors for vacuum ultraviolet rare-gas excimer lasers. We have obtained pulses with 15-mJ energy, 2.7-MW peak power, and 6-ns duration at 126 nm from an argon excimer laser, and with 70 mJ, 5.5 MW, and 5 ns at 146 nm from a krypton excimer laser without any surface damage. The latter values are the highest so far obtained.

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Kou Kurosawa, Ryoichi Sonouchi, Atsushi Yokotani, Wataru Sasaki, Masahito Kattoh, Yasuo Takigawa, and Kazuhito Nishimura "Fabrication, characteristics, and performance of diamond mirrors for vacuum ultraviolet excimer lasers," Optical Engineering 34(5), (1 May 1995). https://doi.org/10.1117/12.199864

Published: 1 May 1995

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