New diffractive beam shaper generated with the aid of e-beam lithography

Michael A. Golub; Michael Rudolf Duparre; Ernst-Bernhard Kley; Richard M. Kowarschik; Barbara Luedge; Werner Rockstroh; Hans-Joerg Fuchs

doi:10.1117/1.600697

1 May 1996 New diffractive beam shaper generated with the aid of e-beam lithography

Michael A. Golub, Michael Rudolf Duparre, Ernst-Bernhard Kley, Richard M. Kowarschik, Barbara Luedge, Werner Rockstroh, Hans-Joerg Fuchs

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Optical Engineering, Vol. 35, Issue 5, (May 1996). https://doi.org/10.1117/1.600697

A diffractive optical element has been fabricated which converts a Gaussian CO2-laser beam into a flat-top rectangle. This was accomplished by enhanced photolithographic technology with e-beam generated masks. Experimental patterns of the shaped intensity for a single-mode CO2 laser are presented.

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Michael A. Golub, Michael Rudolf Duparre, Ernst-Bernhard Kley, Richard M. Kowarschik, Barbara Luedge, Werner Rockstroh, and Hans-Joerg Fuchs "New diffractive beam shaper generated with the aid of e-beam lithography," Optical Engineering 35(5), (1 May 1996). https://doi.org/10.1117/1.600697

Published: 1 May 1996

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