Microlens array imaging system for photolithography

Reinhard Voelkel; Hans Peter Herzig; Philippe Nussbaum; Rene Daendliker; William B. Hugle

doi:10.1117/1.601080

1 November 1996 Microlens array imaging system for photolithography

Reinhard Voelkel, Hans Peter Herzig, Philippe Nussbaum, Rene Daendliker, William B. Hugle

Optical Engineering, Vol. 35, Issue 11, (November 1996). https://doi.org/10.1117/1.601080

A micro-optical system is proposed that uses a stack of four microlens arrays for 1:1 imaging of extended object planes. The system is based on the concept of multiple-aperture imaging. A compact system is presented that is remarkable in that it provides a diffraction-limited resolution of 3 mm for unlimited object and image areas. Resolution of 5 µm has been demonstrated for an area of 20 X 20 mm2 in an experimental setup using melting resist microlens arrays (190-mm lens diameter). The investigated imaging system was developed in connection with a new contactless photolithographic technique called microlens lithography. This new lithographic imaging technique provides an increased depth of focus (>50 µm) at a larger working distance (>1 mm) than with customary proximity printing. Potential applications are photolithography for large print areas (flat panel displays, color filters), for thick photoresist layers (micromechanics), on curved surfaces (or substrates with poor planarity), in V grooves, etc.

Citation Download Citation

Reinhard Voelkel, Hans Peter Herzig, Philippe Nussbaum, Rene Daendliker, and William B. Hugle "Microlens array imaging system for photolithography," Optical Engineering 35(11), (1 November 1996). https://doi.org/10.1117/1.601080

Published: 1 November 1996

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available