1 May 2003 Photoacoustic study of the effect of doping concentration on the transport properties of GaAs epitaxial layers
Sajan D. George, S. Dilna, R. Prasanth, Periasamy Radhakrishnan, C. P. Girija Vallabhan, V. P.N. Nampoori
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We report a photoacoustic (PA) study of the thermal and transport properties of a GaAs epitaxial layer doped with Si at varying doping concentration, grown on GaAs substrate by molecular beam epitaxy. The data are analyzed on the basis of Rosencwaig and Gersho's theory of the PA effect. The amplitude of the PA signal gives information about various heat generation mechanisms in semiconductors. The experimental data obtained from the measurement of the PA signal as a function of modulation frequency in a heat transmission configuration were fitted with the phase of PA signal obtained from the theoretical model evaluated by considering four parameters—viz., thermal diffusivity, diffusion coefficient, nonradiative recombination time, and surface recombination velocity—as adjustable parameters. It is seen from the analysis that the photoacoustic technique is sensitive to the changes in the surface states depend on the doping concentration. The study demonstrates the effectiveness of the photoacoustic technique as a noninvasive and nondestructive method to measure and evaluate the thermal and transport properties of epitaxial layers.
©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)
Sajan D. George, S. Dilna, R. Prasanth, Periasamy Radhakrishnan, C. P. Girija Vallabhan, and V. P.N. Nampoori "Photoacoustic study of the effect of doping concentration on the transport properties of GaAs epitaxial layers," Optical Engineering 42(5), (1 May 2003). https://doi.org/10.1117/1.1564101
Published: 1 May 2003
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Cited by 4 scholarly publications.
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KEYWORDS
Doping

Semiconductors

Diffusion

Gallium arsenide

Photoacoustic spectroscopy

Modulation

Optical proximity correction

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