Fluorescent microscopy of wet-cleaned surfaces: imaging of water stains distribution

Katrina Mikhaylich; V. V. Yakovlev

doi:10.1117/1.1578493

1 July 2003 Fluorescent microscopy of wet-cleaned surfaces: imaging of water stains distribution

Katrina Mikhaylich, V. V. Yakovlev

Optical Engineering, Vol. 42, Issue 7, (July 2003). https://doi.org/10.1117/1.1578493

We use fluorescence optical microscopy to identify water stains on the surface of wet-cleaned silicon wafers. By using a commonly used confocal microscope, submicron resolution is routinely achieved, and both micro- and macroscopic distribution of water stains can be measured. The proposed technique is easy to implement, does not require any special conditions such as vacuum, and can serve as a powerful method in determining the optimal conditions for wet cleaning.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Katrina Mikhaylich and V. V. Yakovlev "Fluorescent microscopy of wet-cleaned surfaces: imaging of water stains distribution," Optical Engineering 42(7), (1 July 2003). https://doi.org/10.1117/1.1578493

Published: 1 July 2003

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