Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement

Xuefeng Zhao; Takamasa Suzuki; Takamasa Masutomi; Osami Sasaki

doi:10.1117/1.2148447

1 December 2005 Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement

Xuefeng Zhao, Takamasa Suzuki, Takamasa Masutomi, Osami Sasaki

Author Affiliations +

Optical Engineering, Vol. 44, Issue 12, 125602 (December 2005). https://doi.org/10.1117/1.2148447

Abstract

A disturbance-free sinusoidal phase modulating laser diode interferometer using an accelerated integrating-buckets processing system is described. Several techniques make it suitable for use in on-machine measurements: the charge-coupled device (CCD)-based additive operation on integrating buckets shares the burden of data processing imposed on the computer to shorten the measurement time; the use of high-speed shutter function of the CCD camera enables each bucket to be collected without disturbance, while the interference signal's stability is enhanced with the feedback control during the entire data-collecting time; by using a dedicated waveform generator, the phase modulating system is more compact and the modulating signal matches the CCD camera's exposure time easily and exactly. A surface profile measurement on a diamond-turned aluminum disk is demonstrated to evaluate the performance of this system.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Xuefeng Zhao, Takamasa Suzuki, Takamasa Masutomi, and Osami Sasaki "Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement," Optical Engineering 44(12), 125602 (1 December 2005). https://doi.org/10.1117/1.2148447

Published: 1 December 2005

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