In-process inspection of surface-profile properties by detecting laser beam deflection

Ryo Shinozaki; Osami Sasaki; Takamasa Suzuki

doi:10.1117/1.2150821

1 January 2006 In-process inspection of surface-profile properties by detecting laser beam deflection

Ryo Shinozaki, Osami Sasaki, Takamasa Suzuki

Author Affiliations +

Optical Engineering, Vol. 45, Issue 1, 013601 (January 2006). https://doi.org/10.1117/1.2150821

Abstract

An inspection system for the surface-profile properties of an organic photoconductor (OPC) drum substrate is studied. Defective substrates have approximately 1-mm-period waves in their surface profiles along the axial direction. The slope distribution of the surface profile is measured with an optical inspection system, which detects the angular deflection of a laser beam scanned over the surface at a high speed of 15 mm/ms. To discriminate between good and defective substrates, a threshold decision is made on components of the experimentally measured power spectrum of the slope distribution around 1-mm spatial period. The inspection system provides the same results as visual inspection with an accuracy better than 6σ. The setup dose not require any vibration isolators, because of its short inspection time of 2 ms.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Ryo Shinozaki, Osami Sasaki, and Takamasa Suzuki "In-process inspection of surface-profile properties by detecting laser beam deflection," Optical Engineering 45(1), 013601 (1 January 2006). https://doi.org/10.1117/1.2150821

Published: 1 January 2006

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