Full-field heterodyne interferometry using a complementary metal-oxide semiconductor digital signal processor camera for high-resolution profilometry

Mauro V. Aguanno; Fereyduon Lakestani; Maurice Patrick Whelan; Michael J. Connelly

doi:10.1117/1.2779346

1 September 2007 Full-field heterodyne interferometry using a complementary metal-oxide semiconductor digital signal processor camera for high-resolution profilometry

Mauro V. Aguanno, Fereyduon Lakestani, Maurice Patrick Whelan, Michael J. Connelly

Author Affiliations +

Optical Engineering, Vol. 46, Issue 9, 095601 (September 2007). https://doi.org/10.1117/1.2779346

Abstract

We describe a heterodyne interferometry system based on a complementary metal-oxide semiconductor digital signal processor (CMOS-DSP) camera that is utilized for full-field optical phase measurement using a carrier-based phase retrieval algorithm, with no need for electro-mechanical scanning. Camera characterization test results support the adoption of a single-pixel approach to perform quasi-instantaneous differential phase measurements, which are immune to mechanical vibrations and thermal drifts. We developed an optical configuration based on a Mach-Zehnder heterodyne interferometer to perform a static test on a mirror surface. The profiles of the mirror surface set at two angular positions, the relative displacements in the range of nanometers, and the corresponding tilt angle were determined.

©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Mauro V. Aguanno, Fereyduon Lakestani, Maurice Patrick Whelan, and Michael J. Connelly "Full-field heterodyne interferometry using a complementary metal-oxide semiconductor digital signal processor camera for high-resolution profilometry," Optical Engineering 46(9), 095601 (1 September 2007). https://doi.org/10.1117/1.2779346

Published: 1 September 2007

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