Common-path two-wavelength interferometer with submicron precision for profile measurements in on-line applications

José Maria Enguita; Ignacio Álvarez; María Frade Rodriguez; Jorge Marina

doi:10.1117/1.3321709

1 February 2010 Common-path two-wavelength interferometer with submicron precision for profile measurements in on-line applications

José Maria Enguita, Ignacio Álvarez, María Frade Rodriguez, Jorge Marina

Author Affiliations +

Optical Engineering, Vol. 49, Issue 2, 023602 (February 2010). https://doi.org/10.1117/1.3321709

Abstract

We propose a common-path two-wavelength interferometric system based on a single optical element, a Savart plate, that is able to obtain single-shot profile measurements with submicron precision from safe working distances (beyond 100 mm). These characteristics make this sensor ideal for surface inspection in on-line applications. For the illumination branch, two lasers with close wavelengths are combined and then passed through a rotating holographic diffuser for drastic speckle reduction. In the acquisition branch, the interferometric signals of both wavelengths are captured simultaneously by a camera, and their phase signals are combined to extend the measurement range.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

José Maria Enguita, Ignacio Álvarez, María Frade Rodriguez, and Jorge Marina "Common-path two-wavelength interferometer with submicron precision for profile measurements in on-line applications," Optical Engineering 49(2), 023602 (1 February 2010). https://doi.org/10.1117/1.3321709

Published: 1 February 2010

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