Optical tilt sensor with direct intensity-modulated scheme

Shuangshuang Zhao; Juan Zhang; Changlun Hou; Jian Bai; Guoguang Yang

doi:10.1117/1.3655566

1 November 2011 Optical tilt sensor with direct intensity-modulated scheme

Shuangshuang Zhao, Juan Zhang, Changlun Hou, Jian Bai, Guoguang Yang

Author Affiliations +

Optical Engineering, Vol. 50, Issue 11, 114405 (November 2011). https://doi.org/10.1117/1.3655566

Abstract

An optical tilt sensor based on a phase-sensitive diffraction grating with direct intensity-modulated scheme is proposed in this paper. The tilt sensor consists of a coherent light source, an integrated grating, a mechanical sensing part, and an optical signal processing circuit. The mechanical sensing part consists of a bulk proof mass and two cantilevers that can be fabricated with a two-mask process on a silicon-on-insulator substrate. A phase-sensitive diffraction grating, which was formed with the integrated grating and the upper surface of the proof mass, acts as the sensing element for the tilt measurement. Experimental results show this tilt sensor provides the optimal tilt sensitivity of 1.15 V/° and resolution of about 0.0046°, and a measurement range of ±20° in a rotational plane that is perpendicular to the direction of the earth's gravity.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Shuangshuang Zhao, Juan Zhang, Changlun Hou, Jian Bai, and Guoguang Yang "Optical tilt sensor with direct intensity-modulated scheme," Optical Engineering 50(11), 114405 (1 November 2011). https://doi.org/10.1117/1.3655566

Published: 1 November 2011

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