New raster-scanned CO2 laser heater for pulsed laser deposition applications: design and modeling for homogenous substrate heating

Muhammad R. Rashidian Vaziri; Fereshteh Hajiesmaeilbaigi; Mohammad Hadi Maleki

doi:10.1117/1.OE.51.4.044301

6 April 2012 New raster-scanned CO₂ laser heater for pulsed laser deposition applications: design and modeling for homogenous substrate heating

Muhammad R. Rashidian Vaziri, Fereshteh Hajiesmaeilbaigi, Mohammad Hadi Maleki

Author Affiliations +

Optical Engineering, Vol. 51, Issue 4, 044301 (April 2012). https://doi.org/10.1117/1.OE.51.4.044301

Abstract

We report on designing a new raster-scanned CO₂ laser heater for homogenous heating of the disk-shaped substrates during pulsed laser depositioning of materials. This new design aims at concentrating the laser energy near the substrate peripheral edge, which mostly tends to remain cooler than the inner parts during the heating process. A comprehensive heat diffusion model has been developed to predict the temperature and its homogeneity on the substrate depositioning face. Conduction and radiation heat transfer in three dimensions with temperature dependant material properties and a moving heat source are taken into account in this transient model. The model is validated by a simple stationary Gaussian laser heat source whose results are in good agreement with our measured values. Using this model, optimum conditions for the growth of garnets are calculated. Short heat-up times, some within minutes, are corroborated by calculations and measurements. An experimental procedure is designed to test the possibility of optical damage occurring in the substrate during this short temperature heat-up time.

Citation Download Citation

Muhammad R. Rashidian Vaziri, Fereshteh Hajiesmaeilbaigi, and Mohammad Hadi Maleki "New raster-scanned CO₂ laser heater for pulsed laser deposition applications: design and modeling for homogenous substrate heating," Optical Engineering 51(4), 044301 (6 April 2012). https://doi.org/10.1117/1.OE.51.4.044301

Published: 6 April 2012

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