4 December 2013 Focal length measurement of microlens array for Shack–Hartmann wavefront sensor using interferometer
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Abstract
We have proposed a method to determine the focal length of microlens array (MLA) based on the measurement of transverse displacement of image spot in the focal plane for a change of angle of incidence of plane wavefront. An existing interferometer test setup, meant for the surface figure measurement of MLA substrate, along with a charge-coupled device (CCD) is used for this purpose. The interferometer generates as well as measures the angle of incidence of plane wavefront at the MLA, and the transverse displacement of the image spot is determined from images recorded with the CCD. We have also discussed the theory of estimation of the focal length of MLA with spherical wavefront. Error analysis is carried out for both methods and is compared. The proposed plane wavefront method is experimentally demonstrated with an off-the-shelf MLA, and the measured focal length is within 1% of catalogue value.
© 2013 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2013/$25.00 © 2013 SPIE
M. Senthil Kumar, Chittur S. Narayanamurthy, and A.S. Kiran Kumar "Focal length measurement of microlens array for Shack–Hartmann wavefront sensor using interferometer," Optical Engineering 52(12), 124103 (4 December 2013). https://doi.org/10.1117/1.OE.52.12.124103
Published: 4 December 2013
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Wavefronts

Microlens

Interferometers

Charge-coupled devices

Microlens array

Spherical lenses

Error analysis

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