In situ and ex situ characterization of optical surfaces by light scattering techniques

Marcus Trost; Tobias Herffurth; Sven Schröder; Angela Duparré; Matthias Beier; Stefan Risse; Andreas Tünnermann; Norbert R. Bowering

doi:10.1117/1.OE.53.9.092013

11 August 2014 In situ and ex situ characterization of optical surfaces by light scattering techniques

Marcus Trost, Tobias Herffurth, Sven Schröder, Angela Duparré, Matthias Beier, Stefan Risse, Andreas Tünnermann, Norbert R. Bowering

Author Affiliations +

Optical Engineering, Vol. 53, Issue 9, 092013 (August 2014). https://doi.org/10.1117/1.OE.53.9.092013

Abstract

The continuous development of optical technologies and the accompanying requirements on the manufacturing process place challenging demands on metrology. In addition to highly sensitive and robust measurement techniques, the inspection tools should be fast and capable of characterizing large and complex-shaped surfaces. These aspects can be addressed by light-scattering-based characterization techniques, which also enable a large flexibility for the measurement conditions because of the noncontact data acquisition and are, thus, suited not only for ex situ but also in situ characterization scenarios. Application examples ranging from the roughness characterization of magneto-rheological finished substrates to polished extreme ultraviolet mirror substrates with diameters of more than 600 mm by compact as well as laboratory-based instruments are presented.

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Marcus Trost, Tobias Herffurth, Sven Schröder, Angela Duparré, Matthias Beier, Stefan Risse, Andreas Tünnermann, and Norbert R. Bowering "In situ and ex situ characterization of optical surfaces by light scattering techniques," Optical Engineering 53(9), 092013 (11 August 2014). https://doi.org/10.1117/1.OE.53.9.092013

Published: 11 August 2014

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