Design and fabrication of polymer-based multimode interference optical splitters

Yuxin Liang; Mingshan Zhao; Yuqing Luo; Yiying Gu; Yang Zhang; Linghua Wang; Xiuyou Han; Zhenlin Wu

doi:10.1117/1.OE.55.11.117102

4 November 2016 Design and fabrication of polymer-based multimode interference optical splitters

Yuxin Liang, Mingshan Zhao, Yuqing Luo, Yiying Gu, Yang Zhang, Linghua Wang, Xiuyou Han, Zhenlin Wu

Author Affiliations +

Optical Engineering, Vol. 55, Issue 11, 117102 (November 2016). https://doi.org/10.1117/1.OE.55.11.117102

Abstract

A polymer-based multimode interference optical splitter chip has been designed and fabricated. Fiber-waveguide coupling loss as well as the structure of the multimode waveguide are optimized in the design to achieve higher performance. A simple UV-based soft nanoimprint lithography (Soft UV-NIL) technique is adopted in the fabrication. Fluorinated acrylate resins, LFR, with different refractive indices are used in this work. Both the residual layer and waveguide deformation are improved by controlling the fabrication processes. An average of 12.98 dB insertion loss is obtained from 1×4 splitters with 1.08 dB uniformity and 0.05 dB polarization-dependent loss. The validity of the polymer optical splitters fabricated through Soft UV-NIL technique is demonstrated by software simulation as well as experimental works.

Citation Download Citation

Yuxin Liang, Mingshan Zhao, Yuqing Luo, Yiying Gu, Yang Zhang, Linghua Wang, Xiuyou Han, and Zhenlin Wu "Design and fabrication of polymer-based multimode interference optical splitters," Optical Engineering 55(11), 117102 (4 November 2016). https://doi.org/10.1117/1.OE.55.11.117102

Published: 4 November 2016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available