Modulated dark-field phasing detection for automatic optical inspection

Heejoo Choi; John Mineo Kam; Joel David Berkson; Logan Rodriguez Graves; Dae Wook Kim

doi:10.1117/1.OE.58.9.092603

26 March 2019 Modulated dark-field phasing detection for automatic optical inspection

Heejoo Choi, John Mineo Kam, Joel David Berkson, Logan Rodriguez Graves, Dae Wook Kim

Author Affiliations +

Optical Engineering, Vol. 58, Issue 9, 092603 (March 2019). https://doi.org/10.1117/1.OE.58.9.092603

Abstract

Dark-field illumination is a simple yet elegant imaging technique that can be used to detect the presence of particles on a specular surface. However, the sensitivity of dark-field illumination to initial conditions affects its repeatability. This is problematic in cases where automation is desired. We present an improvement to the current method of using a modulation field that relies on phase calculations rather than intensity. As a result, we obtain a computational method that is insensitive to noise and provides clearly defined particle information, allowing a global threshold to be set for autonomous measurement purposes. After introducing the theory behind our method, we present experimental results for various scenarios and compare them to those obtained using the dark-field approach.

Citation Download Citation

Heejoo Choi, John Mineo Kam, Joel David Berkson, Logan Rodriguez Graves, and Dae Wook Kim "Modulated dark-field phasing detection for automatic optical inspection," Optical Engineering 58(9), 092603 (26 March 2019). https://doi.org/10.1117/1.OE.58.9.092603

Received: 13 January 2019; Accepted: 4 March 2019; Published: 26 March 2019

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