1 June 1975 Improved Oblique-Incidence Interferometer
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Abstract
An oblique-incidence interferometer for testing the flatness of fine-ground surfaces is described. This uses reflecting diffraction gratings to divide and recombine the beams, resulting in a very compact optical system. In addition, the relative amplitudes of the interfering beams can be adjusted, by a suitable choice of the grating orders used, to give fringes of excellent visibility with surfaces having a wide range of refleetances.
P. Hariharan, "Improved Oblique-Incidence Interferometer," Optical Engineering 14(3), 143257 (1 June 1975). https://doi.org/10.1117/12.7971879 . Submission:
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