1 April 1976 A Step Height Interferometer with One Nanometer Resolution
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Abstract
An interferometer is described for the measurement of thin film steps. The instrument is a double-pass polarization interferometer and has a resolution of one nanometer. It is selfcontained and features simplicity in construction and operation. Measurements illustrating its performance are given.
A. W. Hartman, "A Step Height Interferometer with One Nanometer Resolution," Optical Engineering 15(2), 152180 (1 April 1976). https://doi.org/10.1117/12.7971942 . Submission:
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