1 April 1976 A Step Height Interferometer with One Nanometer Resolution
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Abstract
An interferometer is described for the measurement of thin film steps. The instrument is a double-pass polarization interferometer and has a resolution of one nanometer. It is selfcontained and features simplicity in construction and operation. Measurements illustrating its performance are given.
A. W. Hartman, A. W. Hartman, } "A Step Height Interferometer with One Nanometer Resolution," Optical Engineering 15(2), 152180 (1 April 1976). https://doi.org/10.1117/12.7971942 . Submission:
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