1 August 1976 A Step Height Interferometer with One Nanometer Resolution
A. W. Hartman
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This PDF contains a figure missing from the original publication of "A Step Height Interferometer with One Nanometer Resolution" In Optical Engineering, Vol. 15, No.2, Page 180 (1976)
A. W. Hartman "A Step Height Interferometer with One Nanometer Resolution," Optical Engineering 15(4), 154363 (1 August 1976). https://doi.org/10.1117/12.7971998
Published: 1 August 1976
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Cited by 2 scholarly publications.
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KEYWORDS
Interferometers

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