1 December 1978 Ion Polishing as a Surface Preparation for Dielectric Coating Of Diamond-Turned Optics
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Abstract
A technique to improve the adherence of multilayer dielectric coatings to diamond-turned copper mirror surfaces was developed. The method employs carefully controlled ion polishing, vacuum annealing, and in situ coating of the mirror substrates. It was found that ion polishing the substrates, with as little as 100 A removed, prior to coating improved the film adhe-sion significantly. All of the samples prepared in this manner passed all of the standard ASTM mechanical tests while control samples produced by conventional methods failed the tests. Additional coating evaluation such as reflectivity and laser damage threshold measurements at 10.6 pm, auger analysis for contaminants in the films and at interfaces, SEM characterization, and x-ray energy dispersive analysis are also discussed.
R. A. Hoffman, W. J. Lange, J. G. Gowan, C. J. Miglionico, "Ion Polishing as a Surface Preparation for Dielectric Coating Of Diamond-Turned Optics," Optical Engineering 17(6), 176578 (1 December 1978). https://doi.org/10.1117/12.7972287 . Submission:
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