1 June 1981 Determination Of Plate Contours With A Servo-Scanning Interferometer
Author Affiliations +
Abstract
The history of Badoz's principle of linear detection of fringes having a potential precision of 5 X 10-6 orders and its applications to the measurement of birefringence, to ellipsometry, and to interferometry are given. The application of the principle to a servo-scanning interferometer (Twyman-Green configuration) for the calibration of the instrument, the analysis of the data, and the determination of the absolute contour of small plates is described. The problems of the interferometry and the determination of absolute contours, and the prospects for improving the precision from that attained, 1 /70 fringe, to the very much greater potential of Badoz's principle are discussed.
William Primak, "Determination Of Plate Contours With A Servo-Scanning Interferometer," Optical Engineering 20(3), 203481 (1 June 1981). https://doi.org/10.1117/12.7972745 . Submission:
JOURNAL ARTICLE
5 PAGES


SHARE
RELATED CONTENT

An experimental report on correlated-photon ellipsometry
Proceedings of SPIE (December 12 2003)
Interferometric length measurements
Proceedings of SPIE (February 15 1993)
Laser interferometry-phasometry of nanodisplacement
Proceedings of SPIE (January 11 2007)
Entangled-photon ellipsometry
Proceedings of SPIE (November 19 2003)

Back to Top