Scaling presently available excimer laser systems to lasers designed to operate at high average power and high pulse repetition rates for long periods of time requires advances in many areas of engineering technology. For economical application to industrial processes, the efficiency must be increased. This leads to more stringent requirements on preionization techniques, energy delivery systems, and system chemistry. Long life operation (>109 to 1010 pulses) requires development of new pulse power components, optical ele-ments, and flow system components. A broad-based program underway at the Los Alamos National Laboratory is addressing these key technology issues, with the help of advanced component and systems development programs in industry. A prototype XeCI laser meeting all requirements for efficiency, system performance, and life is scheduled for completion in 1985.