1 December 1982 Comparison Of Two Common Methods Of Surface Topography Evaluation
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Abstract
This paper compares some of the advantages and limitations of two methods used for surface topography evaluation, the dual-beam interference microscope and the stylus-type profiling instrument. Consideration is primarily limited to diamond-machined or other high quality surfaces, such as those commonly encountered on optical elements. Parameters discussed include horizontal and vertical resolution, horizontal and vertical range, and surface damage.
Allen L. Gauler, Allen L. Gauler, } "Comparison Of Two Common Methods Of Surface Topography Evaluation," Optical Engineering 21(6), 216991 (1 December 1982). https://doi.org/10.1117/12.7973021 . Submission:
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