The results of the evaluation of a breadboard, edge-actuated, modal, deformable mirror are given. The mirror was designed to correct for focus and two axes of astigmatism in the Zernike formulation using three actuators. The dynamic response of the mirror, with single mode input, is down 3 dB at 150 Hz with a phase shift of 75°. For single mode input, the surface deformation with static input is linear to at least ±0.1 10.6 (±1.1 um) with cross coupling to the other modes less than 10%. Calibration curves derived from the single mode input data are included. With multimode static inputs, the surface deformation deviation from the calibration curves is generally less than 0.02 10.6.
Julian S. Nichols,
"Performance Evaluation Of An Edge-Actuated, Modal, Deformable Mirror," Optical Engineering 22(3), 223366 (1 June 1983). https://doi.org/10.1117/12.7973121