Scaling Up The Neutral Solution Antireflection Process

G. Richard Wirtenson; Norman J. Brown; Lee M. Cook

doi:10.1117/12.7973142

1 August 1983 Scaling Up The Neutral Solution Antireflection Process

G. Richard Wirtenson, Norman J. Brown, Lee M. Cook

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Optical Engineering, Vol. 22, Issue 4, 224450 (August 1983). https://doi.org/10.1117/12.7973142

Abstract

The neutral solution process (NSP) for chemically producing antireflection coatings has been scaled up from 24 cm and used successfully to treat components as large as 90 cm diameter. Since the process is primarily determined by diffusion through the surface, it has proven to be relatively insensitive to fluid flow effects which influence the chemical concentration buildup at the surface. Large parts visually appear more uniform than small parts processed in model tanks. The major problems encountered have been associated with using plastic support components beyond their normal temperature limits and with handling parts to the required cleanliness outside of a clean room environment.

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G. Richard Wirtenson, Norman J. Brown, and Lee M. Cook "Scaling Up The Neutral Solution Antireflection Process," Optical Engineering 22(4), 224450 (1 August 1983). https://doi.org/10.1117/12.7973142

Published: 1 August 1983

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