Some Observations Of The Effects Of Partial Coherence On Projection System Imagery

Gregory C. Dente; Jeffrey S. Osgood

doi:10.1117/12.7973228

1 December 1983 Some Observations Of The Effects Of Partial Coherence On Projection System Imagery

Gregory C. Dente, Jeffrey S. Osgood

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Optical Engineering, Vol. 22, Issue 6, 226720 (December 1983). https://doi.org/10.1117/12.7973228

Abstract

Partially coherent illumination significantly affects projection system performance. Our theoretical and experimental results cover a variety of test objects imaged with different projection system assemblies, including some nonuniform sources, and show that improved optical lithography performance can be realized.

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Gregory C. Dente and Jeffrey S. Osgood "Some Observations Of The Effects Of Partial Coherence On Projection System Imagery," Optical Engineering 22(6), 226720 (1 December 1983). https://doi.org/10.1117/12.7973228

Published: 1 December 1983

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