Partially coherent illumination significantly affects projection system performance. Our theoretical and experimental results cover a variety of test objects imaged with different projection system assemblies, including some nonuniform sources, and show that improved optical lithography performance can be realized.
Gregory C. Dente,
Jeffrey S. Osgood,
"Some Observations Of The Effects Of Partial Coherence On Projection System Imagery," Optical Engineering 22(6), 226720 (1 December 1983). https://doi.org/10.1117/12.7973228