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1 August 1984 Straightness Measurement System For Slits
C. C. Huang, J. R. Hodor
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Optical Engineering, Vol. 23, Issue 4, 234426 (August 1984). https://doi.org/10.1117/12.7973312
Abstract
An optical system was developed to measure the straightness of a slit to better than 0.04 Am peak-to-peak. The slit (part of a reticle pattern) was 19 Am wide and 25 mm long, lying across the center of one face of a convex spherical lens. The system demonstrated a 0.02 Am peak-to-peak measure-ment repeatability, with a capability of achieving higher accuracy.
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C. C. Huang and J. R. Hodor "Straightness Measurement System For Slits," Optical Engineering 23(4), 234426 (1 August 1984). https://doi.org/10.1117/12.7973312
Published: 1 August 1984
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KEYWORDS
Americium
Reticles
Spherical lenses
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