1 August 1984 Straightness Measurement System For Slits
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Abstract
An optical system was developed to measure the straightness of a slit to better than 0.04 Am peak-to-peak. The slit (part of a reticle pattern) was 19 Am wide and 25 mm long, lying across the center of one face of a convex spherical lens. The system demonstrated a 0.02 Am peak-to-peak measure-ment repeatability, with a capability of achieving higher accuracy.
C. C. Huang, C. C. Huang, J. R. Hodor, J. R. Hodor, } "Straightness Measurement System For Slits," Optical Engineering 23(4), 234426 (1 August 1984). https://doi.org/10.1117/12.7973312 . Submission:
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