Comparison Of Techniques For Measuring The Roughness Of Optical Surfaces

Jean M. Bennett

doi:10.1117/12.7973493

1 June 1985 Comparison Of Techniques For Measuring The Roughness Of Optical Surfaces

Jean M. Bennett

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Optical Engineering, Vol. 24, Issue 3, 243380 (June 1985). https://doi.org/10.1117/12.7973493

Abstract

Instrumental techniques available for measuring the roughness of optical surfaces include mechanical profilometers and optical heterodyne profilometers, both of which yield surface profiles, and total integrated and angle-resolved scattering, from which roughness values can be derived using appropriate theoretical relations. These methods are used to measure the roughness of a set of roughness standards made by polishing ground Zerodur surfaces for progressively longer times. The measured roughnesses are compared, and the reasons for the differences are discussed.

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Jean M. Bennett "Comparison Of Techniques For Measuring The Roughness Of Optical Surfaces," Optical Engineering 24(3), 243380 (1 June 1985). https://doi.org/10.1117/12.7973493

Published: 1 June 1985

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