1 June 1985 Direct Comparison Of Mechanical And Optical Measurements Of The Finish Of Precision Machined Optical Surfaces
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Abstract
This paper compares two methods of measuring the finish of precision machined optical surfaces: the older, well-established mechanical stylus gauge and a recently developed optical gauge using interference microscopy. Results are found to be in good quantitative agreement for both random and periodic surface features, provided that appropriate filtering procedures are included in the data analysis to account for the differing transfer functions and bandwidths of the two measurement techniques. These results affirm the use of these techniques for the quantitative measurement and specification of machined optical surfaces.
E. L. Church, E. L. Church, T. V. Vorburger, T. V. Vorburger, J. C. Wyant, J. C. Wyant, } "Direct Comparison Of Mechanical And Optical Measurements Of The Finish Of Precision Machined Optical Surfaces," Optical Engineering 24(3), 243388 (1 June 1985). https://doi.org/10.1117/12.7973494 . Submission:
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