1 June 1985 Optical Roughness Measuring Instrument For Fine-Machined Surfaces
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Abstract
The roughness measuring instrument described is based on light scattering and is suitable in a wide range of applications, especially in micro-machining. The most important properties are the sensitivity in the measuring range from below 0.005 i.im up to 2µm (Ra value), the independence of the reflection coefficient due to normalization, and the larger tolerance of measur-ing distance of ±2 mm.
Rainer Brodmann, Oskar Gerstorfer, Gerd Thurn, "Optical Roughness Measuring Instrument For Fine-Machined Surfaces," Optical Engineering 24(3), 243408 (1 June 1985). https://doi.org/10.1117/12.7973497 . Submission:
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