1 August 1985 Electron Beam Fabrication Of Computer-Generated Holograms
Author Affiliations +
Abstract
We report here the development of an integrated capability for writing computer-generated holograms (CGHs) using either of two commercially available electron-beam lithography systems. These binary, chrome-on-glass holograms have been used extensively for aspheric optical testing and also have applications to the interferometric recording of holograms. Algorithms are described for encoding CGHs for drawing by e-beam systems. Limitations of e-beam CGH fabrication are discussed. A self-contact lithography and ion milling process is described for con-verting chrome-on-glass holograms into 40% efficient, environmentally durable all-glass holograms.
Steven M. Arnold, Steven M. Arnold, } "Electron Beam Fabrication Of Computer-Generated Holograms," Optical Engineering 24(5), 245803 (1 August 1985). https://doi.org/10.1117/12.7973578 . Submission:
JOURNAL ARTICLE
5 PAGES


SHARE
RELATED CONTENT

Computer-generated holograms for precision optical testing
Proceedings of SPIE (September 26 2016)
Sub-nanometer asphere fabrication and testing
Proceedings of SPIE (September 26 2016)
Computer Holograms For Optical Testing
Proceedings of SPIE (March 30 1982)

Back to Top