1 August 1986 Automatic Electron-Beam Deposition Of Multilayer Soft X-Ray Coatings With Laterally Graded D-Spacing
Author Affiliations +
Abstract
A computer-controlled electron-beam evaporation system is described that allows fully automated production of soft x-ray reflection coatings with laterally graded d-spacings. Thickness control is done by a combination of measurement of the evaporation rate with a quadrupole mass spectrometer and measurement of the soft x-ray reflection coefficient on a reference substrate during deposition. Graded thickness is obtained by computer-controlled movement of shutters. A result is given for automatic deposition of a multilayer coating. The first results for deposition of a multilayer soft x-ray coating with linearly varying d-spacing are presented.
M. P. Bruijn, P. Chakraborty, H. W. van Essen, J. Verhoeven, M. J. van der Wiel, "Automatic Electron-Beam Deposition Of Multilayer Soft X-Ray Coatings With Laterally Graded D-Spacing," Optical Engineering 25(8), 258916 (1 August 1986). https://doi.org/10.1117/12.7973930 . Submission:
JOURNAL ARTICLE
6 PAGES


SHARE
Back to Top