1 August 1986 Automatic Electron-Beam Deposition Of Multilayer Soft X-Ray Coatings With Laterally Graded D-Spacing
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Abstract
A computer-controlled electron-beam evaporation system is described that allows fully automated production of soft x-ray reflection coatings with laterally graded d-spacings. Thickness control is done by a combination of measurement of the evaporation rate with a quadrupole mass spectrometer and measurement of the soft x-ray reflection coefficient on a reference substrate during deposition. Graded thickness is obtained by computer-controlled movement of shutters. A result is given for automatic deposition of a multilayer coating. The first results for deposition of a multilayer soft x-ray coating with linearly varying d-spacing are presented.
M. P. Bruijn, M. P. Bruijn, P. Chakraborty, P. Chakraborty, H. W. van Essen, H. W. van Essen, J. Verhoeven, J. Verhoeven, M. J. van der Wiel, M. J. van der Wiel, } "Automatic Electron-Beam Deposition Of Multilayer Soft X-Ray Coatings With Laterally Graded D-Spacing," Optical Engineering 25(8), 258916 (1 August 1986). https://doi.org/10.1117/12.7973930 . Submission:
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