Analytical Electron Microscopy Of Multilayered Thin Films Using Microcleavage

Yves Lepetre; Ivan K. Schuller; Georges Rasigni; Rene Rivoira; Roger Philip; Pierre Dhez

doi:10.1117/12.7973934

1 August 1986 Analytical Electron Microscopy Of Multilayered Thin Films Using Microcleavage

Yves Lepetre, Ivan K. Schuller, Georges Rasigni, Rene Rivoira, Roger Philip, Pierre Dhez

Author Affiliations +

Optical Engineering, Vol. 25, Issue 8, 258948 (August 1986). https://doi.org/10.1117/12.7973934

Abstract

Microcleavage transmission electron microscopy (MTEM) has been applied to the study of many properties of multilayered samples. We illustrate the unique capabilities of this technique for obtaining a detailed structural picture of the multilayer in order to study long-range perpendicular thickness drifts, lateral variations, roughness, substrate quality, adherence, thermal stability, composition, and crystallinity.

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Yves Lepetre, Ivan K. Schuller, Georges Rasigni, Rene Rivoira, Roger Philip, and Pierre Dhez "Analytical Electron Microscopy Of Multilayered Thin Films Using Microcleavage," Optical Engineering 25(8), 258948 (1 August 1986). https://doi.org/10.1117/12.7973934

Published: 1 August 1986

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