1 August 1986 Analytical Electron Microscopy Of Multilayered Thin Films Using Microcleavage
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Abstract
Microcleavage transmission electron microscopy (MTEM) has been applied to the study of many properties of multilayered samples. We illustrate the unique capabilities of this technique for obtaining a detailed structural picture of the multilayer in order to study long-range perpendicular thickness drifts, lateral variations, roughness, substrate quality, adherence, thermal stability, composition, and crystallinity.
Yves Lepetre, Yves Lepetre, Ivan K. Schuller, Ivan K. Schuller, Georges Rasigni, Georges Rasigni, Rene Rivoira, Rene Rivoira, Roger Philip, Roger Philip, Pierre Dhez, Pierre Dhez, } "Analytical Electron Microscopy Of Multilayered Thin Films Using Microcleavage," Optical Engineering 25(8), 258948 (1 August 1986). https://doi.org/10.1117/12.7973934 . Submission:
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