1 August 1986 Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer Coating
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Abstract
The influence of thickness errors and boundary imperfections on the performance of a multilayer x-ray mirror is discussed, and it is shown that both can be obtained separately from a measured reflectivity curve at a short x-ray wavelength. Multilayers have greatly reduced scattering compared to single films, and for this reason rough boundaries and gradual transition layers between the film materials give practically identical performance. A simple Debye-Waller factor is not sufficient to describe the performance of a multi-layer with many layers at short wavelengths.
Eberhard Spiller, Alan E. Rosenbluth, "Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer Coating," Optical Engineering 25(8), 258954 (1 August 1986). https://doi.org/10.1117/12.7973935 . Submission:
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