1 December 1987 Interferometry On Grazing Incidence Optics
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Abstract
An interferometric procedure is described that shows potential for obtaining surface figure error maps of grazing incidence optics at normal incidence. Such optics are found in some laser resonator configurations and in Wolter-type x-ray optics. The procedure makes use of cylindrical wavefronts and error subtraction techniques over subapertures. The surface error maps obtained will provide critical information to opticians for the fabrication process.
Joseph M. Geary, Riki Maeda, "Interferometry On Grazing Incidence Optics," Optical Engineering 26(12), 261225 (1 December 1987). https://doi.org/10.1117/12.7977159
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