Improved Resolution Of Multilayer X-Ray Coatings: A Distributed Fabry-Perot Etalon

M. P. Bruijin; J. Verhoeven; M. J. van der Wiel; W. J. Bartels

doi:10.1117/12.7974135

1 July 1987 Improved Resolution Of Multilayer X-Ray Coatings: A Distributed Fabry-Perot Etalon

M. P. Bruijin, J. Verhoeven, M. J. van der Wiel, W. J. Bartels

Author Affiliations +

Optical Engineering, Vol. 26, Issue 7, 267679 (July 1987). https://doi.org/10.1117/12.7974135

Abstract

A new type of multilayer x-ray reflection coating has been de-signed and deposited: a so-called distributed Fabry-Perot etalon, consist-ing of a normal periodic multilayer in which extra periods of only spacer material are distributed. As an example, we deposited a ReW/C multilayer (d = 22 A, 90 periods) in which 90 extra C periods (d = 22 A) were ran-domly distributed. At X = 1.54 A, the resolution X/AX was limited by sub-strate flatness and was measured to be 133 (compared to about 90 for a , regular 90 period stack). The peak reflectivity is 21%. Crucial for deposition of this structure was a reduced substrate temperature (T = -150°C). The effective roughness of the interfaces is a constant 5 A throughout the entire stack.

Citation Download Citation

M. P. Bruijin, J. Verhoeven, M. J. van der Wiel, and W. J. Bartels "Improved Resolution Of Multilayer X-Ray Coatings: A Distributed Fabry-Perot Etalon," Optical Engineering 26(7), 267679 (1 July 1987). https://doi.org/10.1117/12.7974135

Published: 1 July 1987

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