1 July 1987 Improved Resolution Of Multilayer X-Ray Coatings: A Distributed Fabry-Perot Etalon
Author Affiliations +
Abstract
A new type of multilayer x-ray reflection coating has been de-signed and deposited: a so-called distributed Fabry-Perot etalon, consist-ing of a normal periodic multilayer in which extra periods of only spacer material are distributed. As an example, we deposited a ReW/C multilayer (d = 22 A, 90 periods) in which 90 extra C periods (d = 22 A) were ran-domly distributed. At X = 1.54 A, the resolution X/AX was limited by sub-strate flatness and was measured to be 133 (compared to about 90 for a , regular 90 period stack). The peak reflectivity is 21%. Crucial for deposition of this structure was a reduced substrate temperature (T = -150°C). The effective roughness of the interfaces is a constant 5 A throughout the entire stack.
M. P. Bruijin, M. P. Bruijin, J. Verhoeven, J. Verhoeven, M. J. van der Wiel, M. J. van der Wiel, W. J. Bartels, W. J. Bartels, } "Improved Resolution Of Multilayer X-Ray Coatings: A Distributed Fabry-Perot Etalon," Optical Engineering 26(7), 267679 (1 July 1987). https://doi.org/10.1117/12.7974135 . Submission:
JOURNAL ARTICLE
-678 PAGES


SHARE
Back to Top