1 September 1987 Large Format, High Resolution Image Sensors
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Abstract
Tektronix is currently fabricating two very large area charge-coupled-device sensors intended for astronomical and other high performance scientific imaging applications, e.g., medical imaging, fluoroscopy, x-ray imaging, spectrometry, particle detectors, etc. In this paper we discuss the performance requirements for scientific-quality CCDs and then focus on the design of the two Tektronix devices and discuss the progress toward achieving the desired performance. These devices are intended for rear-illuminated applications and have 512 X512 and 2048 X2048 pixel formats. The thinned 10 to 20 pm thick Si membrane is fully supported by a unique glass ceramic substrate. Quantum efficiencies of >70% at 700 nm and >40% at wavelengths <400 nm have been measured on a test device. Dark currents as low as 6 pA/cm2 also have been measured recently.
Morley M. Blouke, B. Corrie, Denis L. Heidtmann, F. H. Yang, M. Winzenread, M. L. Lust, H. H. Marsh, James R. Janesick, "Large Format, High Resolution Image Sensors," Optical Engineering 26(9), 269837 (1 September 1987). https://doi.org/10.1117/12.7974160 . Submission:
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